JPH0135466B2 - - Google Patents

Info

Publication number
JPH0135466B2
JPH0135466B2 JP58206149A JP20614983A JPH0135466B2 JP H0135466 B2 JPH0135466 B2 JP H0135466B2 JP 58206149 A JP58206149 A JP 58206149A JP 20614983 A JP20614983 A JP 20614983A JP H0135466 B2 JPH0135466 B2 JP H0135466B2
Authority
JP
Japan
Prior art keywords
voltage
circuit
output
high voltage
panel meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58206149A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60100350A (ja
Inventor
Tei Kawai
Kuniharu Tagami
Masaaki Sasaki
Yasuhiro Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP58206149A priority Critical patent/JPS60100350A/ja
Publication of JPS60100350A publication Critical patent/JPS60100350A/ja
Publication of JPH0135466B2 publication Critical patent/JPH0135466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Audible And Visible Signals (AREA)
  • Particle Accelerators (AREA)
JP58206149A 1983-11-02 1983-11-02 荷電粒子加速装置用高電圧電源装置 Granted JPS60100350A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58206149A JPS60100350A (ja) 1983-11-02 1983-11-02 荷電粒子加速装置用高電圧電源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58206149A JPS60100350A (ja) 1983-11-02 1983-11-02 荷電粒子加速装置用高電圧電源装置

Publications (2)

Publication Number Publication Date
JPS60100350A JPS60100350A (ja) 1985-06-04
JPH0135466B2 true JPH0135466B2 (en]) 1989-07-25

Family

ID=16518601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58206149A Granted JPS60100350A (ja) 1983-11-02 1983-11-02 荷電粒子加速装置用高電圧電源装置

Country Status (1)

Country Link
JP (1) JPS60100350A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0793123B2 (ja) * 1986-01-27 1995-10-09 日新電機株式会社 イオン注入装置
JPS63133251U (en]) * 1987-02-25 1988-08-31

Also Published As

Publication number Publication date
JPS60100350A (ja) 1985-06-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees